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Beneq TFS-200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Beneq TFS-200 hardware returned 69 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
2Impurity Gettering by Atomic-Layer-Deposited Aluminium Oxide Films on Silicon at Contact Firing Temperatures
3Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
4Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing
5Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
6Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
7Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
8ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies
9Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
10Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
11Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
12Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
13Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
14Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
15Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
16A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
17MANOS performance dependence on ALD Al2O3 oxidation source
18Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
19Plasma-Modified Atomic Layer Deposition
20Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
21Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
22Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
23Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
24The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
25Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
26Optical properties and bandgap evolution of ALD HfSiOx films
27MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
28Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
29The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
30Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
31Tribological properties of thin films made by atomic layer deposition sliding against silicon
32Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
33Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
34Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
35Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
36Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact
37Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
38Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
39In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
40Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
41Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
42Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
43Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
44Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
45Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
46Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
47Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
48Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
49Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
50Low temperature temporal and spatial atomic layer deposition of TiO2 films
51Analog/RF Study of Self-aligned In0.53Ga0.47As MOSFET with Scaled Gate Length
52Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition
53Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface
54Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
55Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
56Integration of plasmonic Ag nanoparticles as a back reflector in ultra-thin Cu(In,Ga)Se2 solar cells
57Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
58Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
59Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
60Residual stress study of thin films deposited by atomic layer deposition
61Nitride passivation of the interface between high-k dielectrics and SiGe
62Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
63Modal properties of a strip-loaded horizontal slot waveguide
64Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
65Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
66Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
67Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
68Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
69Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure