Beneq TFS-200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Beneq TFS-200 hardware returned 60 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
2Analog/RF Study of Self-aligned In0.53Ga0.47As MOSFET with Scaled Gate Length
3Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
4Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
5Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
6Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
7Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
8Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
9Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
10Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
11Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
12Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
13Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
14Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition
15Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
16Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
17Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
18Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
19Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
20Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
21Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
22Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
23Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
24Impurity Gettering by Atomic-Layer-Deposited Aluminium Oxide Films on Silicon at Contact Firing Temperatures
25Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
26Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
27Integration of plasmonic Ag nanoparticles as a back reflector in ultra-thin Cu(In,Ga)Se2 solar cells
28Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface
29Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
30Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
31Low temperature temporal and spatial atomic layer deposition of TiO2 films
32Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
33MANOS performance dependence on ALD Al2O3 oxidation source
34Modal properties of a strip-loaded horizontal slot waveguide
35MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
36Nitride passivation of the interface between high-k dielectrics and SiGe
37Optical properties and bandgap evolution of ALD HfSiOx films
38Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
39Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
40Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
41Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
42Plasma-Modified Atomic Layer Deposition
43Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
44Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
45Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
46Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
47Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
48Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
49Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
50Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
51Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
52Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact
53Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
54Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
55The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
56The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
57Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
58Tribological properties of thin films made by atomic layer deposition sliding against silicon
59Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
60Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing