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Beneq TFS-200 Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications using Beneq TFS-200 hardware returned 69 records. If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
2Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition
3Chemical, optical, and electrical characterization of Ga2O3 thin films grown by plasma-enhanced atomic layer deposition
4Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
5The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
6Plasma-Enhanced Atomic Layer Deposition of Nickel Nanotubes with Low Resistivity and Coherent Magnetization Dynamics for 3D Spintronics
7Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
8Demonstration of c-Si Solar Cells With Gallium Oxide Surface Passivation and Laser-Doped Gallium p+ Regions
9Enhanced photocatalytic performance in atomic layer deposition grown TiO2 thin films via hydrogen plasma treatment
10Tuning the nanoscale morphology and optical properties of porous gold nanoparticles by surface passivation and annealing
11Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
12Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces
13Tribological properties of thin films made by atomic layer deposition sliding against silicon
14Impact of the firing step on Al2O3 passivation on p-type Czochralski Si wafers: Electrical and chemical approaches
15ALD and PEALD deposition of HfO2 and its effects on the nature of oxygen vacancies
16Degradation of the surface passivation of plasma-assisted ALD Al2O3 under damp-heat exposure
17Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice
18Growing oriented AlN films on sapphire substrates by plasma-enhanced atomic layer deposition
19Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
20Integration of plasmonic Ag nanoparticles as a back reflector in ultra-thin Cu(In,Ga)Se2 solar cells
21Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
22Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
23Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact
24Effect of Thermal Annealing on La2O3 Films Grown by Plasma Enhanced Atomic Layer Deposition
25Growing aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
26Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
27MANOS performance dependence on ALD Al2O3 oxidation source
28Influence of plasma parameters on the properties of ultrathin Al2O3 films prepared by plasma enhanced atomic layer deposition below 100C for moisture barrier applications
29Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
30Growth of aluminum nitride films by plasma-enhanced atomic layer deposition
31MOS Capacitance Measurements for PEALD TiO2 Dielectric Films Grown under Different Conditions and the Impact of Al2O3 Partial-Monolayer Insertion
32Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
33Atomic layer deposition of RuO2 thin films on SiO2 using Ru(EtCp)2 and O2 plasma
34Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
35Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
36Gas permeation barriers deposited by atmospheric pressure plasma enhanced atomic layer deposition
37Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
38Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors
39In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
40A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
41Growing c-axis oriented aluminum nitride films by Plasma-Enhanced Atomic Layer Deposition at low temperatures
42Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
43Low temperature temporal and spatial atomic layer deposition of TiO2 films
44Relationships among growth mechanism, structure and morphology of PEALD TiO2 films: the influence of O2 plasma power, precursor chemistry and plasma exposure mode
45Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
46Analog/RF Study of Self-aligned In0.53Ga0.47As MOSFET with Scaled Gate Length
47Atomic scale surface modification of TiO2 3D nano-arrays: plasma enhanced atomic layer deposition of NiO for photocatalysis
48Residual stress study of thin films deposited by atomic layer deposition
49Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
50Ru Thin Film Formation Using Oxygen Plasma Enhanced ALD and Rapid Thermal Processing
51Surface-enhanced gallium arsenide photonic resonator with a quality factor of six million
52Low-Temperature Plasma-Enhanced Atomic Layer Deposition of SiO2 Using Carbon Dioxide
53Modal properties of a strip-loaded horizontal slot waveguide
54Atomic-layer-deposited silver and dielectric nanostructures for plasmonic enhancement of Raman scattering from nanoscale ultrathin films
55Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiO2 Coating
56The α and γ plasma modes in plasma-enhanced atomic layer deposition with O2-N2 capacitive discharges
57Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
58Resistive switching in HfO2-based atomic layer deposition grown metal-insulator-metal structures
59Impurity Gettering by Atomic-Layer-Deposited Aluminium Oxide Films on Silicon at Contact Firing Temperatures
60Investigation of field-effect passivation and interface state parameters at the Al2O3/Si interface
61Room-temperature plasma-enhanced atomic layer deposition of ZnO: Film growth dependence on the PEALD reactor configuration
62Optical properties and bandgap evolution of ALD HfSiOx films
63Band alignment of atomic layer deposited TiO2/multilayer MoS2 interface determined by x-ray photoelectron spectroscopy
64Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
65Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
66Investigation of residual chlorine in TiO2 films grown by Atomic Layer Deposition
67Nitride passivation of the interface between high-k dielectrics and SiGe
68Thermomechanical properties of aluminum oxide thin films made by atomic layer deposition
69Plasma-Modified Atomic Layer Deposition