Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition

Type:
Journal
Info:
Surface & Coatings Technology 333 (2018) 81 - 86
Date:
2017-10-24
DOI:
https://doi.org/10.1016/j.surfcoat.2017.10.067

Author Information

Name Institution
Ales OmerzuUniversity of Rijeka
Iva SaricUniversity of Rijeka
Ivna Kavre PiltaverUniversity of Rijeka
Mladen PetravicUniversity of Rijeka
Tea KapunPulp and Paper Institute
Janja ZulePulp and Paper Institute
Sanja StifterUniversity of Rijeka
Kresimir SalamonRudjer Boskovic Institute

Films

Plasma Al2O3

Hardware used: Beneq TFS-200
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature Range = 40-110C

Thermal Al2O3

Hardware used: Beneq TFS-200
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
Where to buy precursor
H2O, Water
CAS#: 7732-18-5
Where to buy precursor
Deposition Temperature = 110C

Film/Plasma Properties

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL JSM-7800F

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: JEOL JSM-7800F

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL JSM-7800F

Substrates

Cotton
Paper
Wood

Notes

1125