Mladen Petravic Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mladen Petravic returned 3 record(s).

Number	Title
1	Investigation of residual chlorine in TiO₂ films grown by Atomic Layer Deposition
2	Residual chlorine in TiO₂ films grown at low temperatures by plasma enhanced atomic layer deposition
3	Prevention of spontaneous combustion of cellulose with a thin protective Al₂O₃ coating formed by atomic layer deposition