Inductively coupled plasma sources from Plasma ALD, LLC.


Ideal for plasma enhanced atomic layer deposition and other surface engineering applications.


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Kresimir Salamon Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kresimir Salamon returned 2 record(s).

NumberTitle
1Prevention of spontaneous combustion of cellulose with a thin protective Al2O3 coating formed by atomic layer deposition
2Residual chlorine in TiO2 films grown at low temperatures by plasma enhanced atomic layer deposition