The publication database currently has 1556 entries.
Search from:
191 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses
Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)
ALD Links
Contact Us
Advertising
Recent Database Additions
Plasma-enhanced atomic layer deposition of gallium nitride thin films on fluorine-doped tin oxide glass substrate for future photovoltaic application
Plasma enhanced atomic layer deposition of thin film Li1+xMn2-xO4 for realization of all solid-state 3D lithium-ion microbatteries
AlN PEALD with TMA and forming gas: study of plasma reaction mechanisms
Search 1556 plasma ALD publications by:
Search 1556 plasma ALD publications by:
Simple silicon solar cells featuring an a-Si:H enhanced rear MIS contact
Type:
Journal
Info:
Solar Energy Materials and Solar Cells, Volume 138, 2015, Pages 22 - 25
Date:
2015-02-23
Author Information
| Name | Institution |
|---|---|
| James Bullock | The Australian National University |
| Andres Cuevas | The Australian National University |
| Christian Samundsett | The Australian National University |
| Di Yan | The Australian National University |
| Josephine McKeon | The Australian National University |
| Yimao Wan | The Australian National University |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
Keywords
Notes
| 385 |
Popular Precursors
Top Authors
| Erwin (W.M.M.) Kessels |
| Hyeongtag Jeon |
| Hyungjun Kim |
| Mauritius C. M. (Richard) van de Sanden |
| Christophe Detavernier |