Publication Information

Title: Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films

Type: Conference Proceedings

Info: ECS Trans. 2014 volume 64, issue 9, 279-289

Date: 2014-10-08

DOI: http://dx.doi.org/10.1149/06409.0279ecst

Author Information

Name

Institution

U.S. Naval Research Laboratory

Films

Plasma Ag using Beneq TFS-200

Deposition Temperature Range N/A

165461-74-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Resistivity, Sheet Resistance

Unknown

-

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

-

Thickness

Ellipsometry

-

Thickness

AFM, Atomic Force Microscopy

-

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

-

Substrates

Keywords

Plasmonics

Metallic Thin Films

Silver

Notes

Beneq TFS-200 PEALD Ag for plasmonic study.

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