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Publication Information

Title: Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films

Type: Conference Proceedings

Info: ECS Trans. 2014 volume 64, issue 9, 279-289

Date: 2014-10-08

DOI: http://dx.doi.org/10.1149/06409.0279ecst

Author Information

Name

Institution

U.S. Naval Research Laboratory

Films

Plasma Ag using Beneq TFS-200

Deposition Temperature Range N/A

165461-74-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Resistivity, Sheet Resistance

Unknown

Unknown

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Thickness

Ellipsometry

Unknown

Thickness

AFM, Atomic Force Microscopy

Unknown

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

Unknown

Substrates

Keywords

Plasmonics

Metallic Thin Films

Silver

Notes

Beneq TFS-200 PEALD Ag for plasmonic study.

284

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