Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
Type:
Conference Proceedings
Info:
ECS Trans. 2014 volume 64, issue 9, 279-289
Date:
2014-10-08
Author Information
| Name | Institution |
|---|---|
| Sharka M. Prokes | U.S. Naval Research Laboratory |
Films
Plasma Ag
Film/Plasma Properties
Characteristic: Resistivity, Sheet Resistance
Analysis: -
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Thickness
Analysis: AFM, Atomic Force Microscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Substrates
Notes
| Beneq TFS-200 PEALD Ag for plasmonic study. |
| 284 |