Sharka M. Prokes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sharka M. Prokes returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
2Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
3Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
4Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
5In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
6Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
7Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
8Plasma-Modified Atomic Layer Deposition