Sharka M. Prokes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sharka M. Prokes returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
2Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
3Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
4Plasma-Modified Atomic Layer Deposition
5Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
6Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
7Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition


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