Sharka M. Prokes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sharka M. Prokes returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
2Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
3In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications
4Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
5Plasma-Modified Atomic Layer Deposition
6Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
7Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
8Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition