Sharka M. Prokes Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Sharka M. Prokes returned 8 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Electronic properties of atomic-layer-deposited high-k dielectrics on GaSb(001) with hydrogen plasma pretreatment
2Plasma-Modified Atomic Layer Deposition
3Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition
4Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
5Self Assembled Metamaterials Formed via Plasma Enhanced ALD of Ag Thin Films
6Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
7Atomic layer deposition of Al2O3 on GaSb using in situ hydrogen plasma exposure
8In Situ Hydrogen Plasma Exposure for Varying the Stoichiometry of Atomic Layer Deposited Niobium Oxide Films for Use in Neuromorphic Computing Applications