Publication Information

Title: Plasma-Modified Atomic Layer Deposition

Type: Conference Proceedings

Info: 68th Annual Gaseous Electronics Conference

Date: 2015-10-13

DOI: http://meetings.aps.org/link/BAPS.2015.GEC.GT1.165

Author Information

Name

Institution

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

Films

Other ZnO using Beneq TFS-200

Deposition Temperature Range N/A

Other VOx using Beneq TFS-200

Deposition Temperature Range N/A

Other HfO2 using Beneq TFS-200

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Unknown

-

Plasmon Resonances

Unknown

-

Electron Paramagnetic Resonance

Unknown

-

Optical Dispersion

Unknown

-

Mobility

Unknown

-

Carrier Concentration

Unknown

-

Resistivity, Sheet Resistance

Unknown

-

Substrates

Keywords

Notes

520



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