The publication database currently has 1574 entries.
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196 Films Compositions
265 Precursors and Plasma Gases
76 Deposition Hardwares
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HfO2/SiO2 anti-reflection films for UV lasers via plasma-enhanced atomic layer deposition
Low-temperature growth of gallium oxide thin films by plasma-enhanced atomic layer deposition
Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS2: large area, thickness control and tuneable morphology
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Thomas Larrabee Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Thomas Larrabee returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Plasma-Modified Atomic Layer Deposition |
| 2 | Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition |