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VOx Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing VOx films returned 5 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
2Comparison of Thermal and Plasma-Enhanced ALD/CVD of Vanadium Pentoxide
3Evaluation of V2O5 Coatings Grown By Plasma Enhanced and Thermal Atomic Layer Deposition
4Plasma-Modified Atomic Layer Deposition
5Tunable Electrical Properties of Vanadium Oxide by Hydrogen-Plasma-Treated Atomic Layer Deposition

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