Publication Information

Title: Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5

Type: Journal

Info: ACS Appl. Mater. Interfaces, 2017, 9 (3), pp 3178-3185

Date: 2016-12-29

DOI: http://dx.doi.org/10.1021/acsami.6b14882

Author Information

Name

Institution

Jawaharlal Nehru Centre for Advanced Scientific Research

Jawaharlal Nehru Centre for Advanced Scientific Research

Jawaharlal Nehru Centre for Advanced Scientific Research

Jawaharlal Nehru Centre for Advanced Scientific Research

Films

Plasma VOx using Beneq TFS-200

Deposition Temperature Range = 170-240C

3153-26-2

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

XRD, X-Ray Diffraction

PANalytical Empyrean

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Raman Spectroscopy

Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Raman Spectra

Raman Spectroscopy

Horiba Jobin Yvon LabRAM HR800 Raman Spectroscope

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Omicron Nanotechnology XM 1000 MkII/Sphera system

Thickness

SEM, Scanning Electron Microscopy

FEI Nova NanoSEM 600

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

FEI Nova NanoSEM 600

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Bruker Innova

Images

TEM, Transmission Electron Microscope

FEI Titan S 80-300 TEM/STEM

Thickness

TEM, Transmission Electron Microscope

FEI Titan S 80-300 TEM/STEM

Crystallinity, Crystal Structure, Grain Size, Atomic Structure

Electron Diffraction

FEI Titan S 80-300 TEM/STEM

Chemical Composition, Impurities

ELS, EELS, Electron Energy Loss Spectroscopy

FEI Titan S 80-300 TEM/STEM

Optical Properties

Optical Absorption

PerkinElmer UV−Vis spectrometer

Carrier Concentration

Hall Measurements

Ecopia HMS-3000

Photoresponse

Custom

Keithley 4200-SCS

Leakage Current

I-V, Current-Voltage Measurements

Keithley 4200-SCS

Humidity Sensor

Custom

Keithley 4200-SCS

Substrates

Sapphire

Keywords

Humidity Sensor

Notes

846



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