Publication Information

Title:
Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5
Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (3), pp 3178-3185
Date:
2016-12-29

Author Information

Name Institution
M. B. SreedharaJawaharlal Nehru Centre for Advanced Scientific Research
J. GhatakJawaharlal Nehru Centre for Advanced Scientific Research
B. BharathJawaharlal Nehru Centre for Advanced Scientific Research
C. N. R. RaoJawaharlal Nehru Centre for Advanced Scientific Research

Films

Plasma VOx


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Raman Spectroscopy

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope

Characteristic: Thickness
Analysis: TEM, Transmission Electron Microscope

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: Electron Diffraction

Characteristic: Chemical Composition, Impurities
Analysis: ELS, EELS, Electron Energy Loss Spectroscopy

Characteristic: Optical Properties
Analysis: Optical Absorption

Characteristic: Carrier Concentration
Analysis: Hall Measurements

Characteristic: Photoresponse
Analysis: Custom

Characteristic: Leakage Current
Analysis: I-V, Current-Voltage Measurements

Characteristic: Humidity Sensor
Analysis: Custom

Substrates

Sapphire

Keywords

Humidity Sensor

Notes

846