Search 1628 plasma ALD publications by:
VO(acac)2, VO(pd)2, Vanadyl acetylacetonate, oxobis(2,4-pentanedionato)vanadium(IV), CAS# 3153-26-2
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Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for publications using this chemistry returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Atomic Layer Deposition of Ultrathin Crystalline Epitaxial Films of V2O5|