Publication Information

Title: Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars

Type: Journal

Info: 19 December 2011 / Vol. 19, No. 27 / OPTICS EXPRESS

Date: 2011-11-19

DOI: http://dx.doi.org/10.1364/OE.19.026056

Author Information

Name

Institution

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

University of Helsinki

University of Helsinki

University of Helsinki

U.S. Naval Research Laboratory

Howard University

University of Helsinki

U.S. Naval Research Laboratory

Howard University

University of Helsinki

CNST-NIST

Films

Plasma Ag using Beneq TFS-200

Deposition Temperature Range N/A

165461-74-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Chemical Composition, Impurities

XPS, X-ray Photoelectron Spectroscopy

Unknown

Images

SEM, Scanning Electron Microscopy

Unknown

Conformality, Step Coverage

SEM, Scanning Electron Microscopy

Unknown

Morphology, Roughness, Topography

SEM, Scanning Electron Microscopy

Unknown

SERS

SERS, Surface Enhanced Raman Scattering

DeltaNu ExamineR μ-Raman

Substrates

Silicon

Keywords

Plasmonics

Silver

Notes

Beneq TFS-200 Ag PEALD on Si nanopillar templates to achieve large-area, periodic "hot-spot" arrays.

177



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