Publication Information

Title:
Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
Type:
Journal
Info:
19 December 2011 / Vol. 19, No. 27 / OPTICS EXPRESS
Date:
2011-11-19

Author Information

Name Institution
Joshua D. CaldwellU.S. Naval Research Laboratory
Orest J. GlembockiU.S. Naval Research Laboratory
Francisco J. BezaresU.S. Naval Research Laboratory
Maarit I. KariniemiUniversity of Helsinki
Jaakko T. NiinistöUniversity of Helsinki
Timo T. HatanpääUniversity of Helsinki
Ronald W. RendellU.S. Naval Research Laboratory
Maraizu UkaegbuHoward University
Mikko K. RitalaUniversity of Helsinki
Sharka M. ProkesU.S. Naval Research Laboratory
Charles M. HostenHoward University
Markku A. LeskeläUniversity of Helsinki
Richard KasicaCNST-NIST

Films


Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Conformality, Step Coverage
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: SERS
Analysis: SERS, Surface Enhanced Raman Scattering

Substrates

Silicon

Keywords

Plasmonics
Silver

Notes

Beneq TFS-200 Ag PEALD on Si nanopillar templates to achieve large-area, periodic "hot-spot" arrays.
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