2021 Year in Review

The publication database currently has 1628 entries.

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272 Precursors and Plasma Gases

251 Film and Plasma Characteristics

90 Theses

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Effect of atomic layer plasma treatment on TALD-ZrO₂ film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO₂ Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation

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203 Films Compositions

272 Precursors and Plasma Gases

77 Deposition Hardwares

251 Film and Plasma Characteristics

Jaakko T. Niinistö Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaakko T. Niinistö returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

Number	Title
1	Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
2	Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3	Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
4	MANOS performance dependence on ALD Al₂O₃ oxidation source
5	Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6	Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films