Jaakko T. Niinistö Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Jaakko T. Niinistö returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
2MANOS performance dependence on ALD Al2O3 oxidation source
3Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
4Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
5Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study