Publication Information

Title: Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films

Type: Journal

Info: APPLIED PHYSICS LETTERS 100, 053106 (2012)

Date: 2011-12-28

DOI: http://dx.doi.org/10.1063/1.3679106

Author Information

Name

Institution

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

U.S. Naval Research Laboratory

University of Helsinki

University of Helsinki

Films

Plasma Ag using Beneq TFS-200

Deposition Temperature = 125C

165461-74-5

1333-74-0

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Thickness

n,k Spectrometry

Unknown

Microstructure

SEM, Scanning Electron Microscopy

Leica Cambridge Stereoscan 360FE

SERS

SERS, Surface Enhanced Raman Scattering

Custom

SERS

SERS, Surface Enhanced Raman Scattering

DeltaNu Reporter 785

Substrates

Si(100)

Keywords

Silver Thin Films

Silver

Plasmonics

Notes

Beneq TFS-200 PEALD Ag thin film plasmonic behavior study.

300



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