Mikko K. Ritala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko K. Ritala returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
2Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
3Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
4Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
5Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
7Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
8Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
9Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
10MANOS performance dependence on ALD Al2O3 oxidation source
11Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
12Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
13Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
14Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
15Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor