Mikko K. Ritala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko K. Ritala returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
2Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
3Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
4Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
5Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
6MANOS performance dependence on ALD Al2O3 oxidation source
7Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
8Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
9Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
10Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
11Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
12Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
13Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
14Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
15Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage