Mikko K. Ritala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko K. Ritala returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
2Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
3Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
4Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
5Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
6Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
7Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films
8Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
9Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
10MANOS performance dependence on ALD Al2O3 oxidation source
11Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
12Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
13Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
14Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
15Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars