Mikko K. Ritala Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Mikko K. Ritala returned 15 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic Layer Deposition (ALD) grown thin films for ultra-fine pitch pixel detectors
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
4Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
5Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
6MANOS performance dependence on ALD Al2O3 oxidation source
7Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
8Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
9Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
10Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
11Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
12Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
13Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
14Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
15Spoof-like plasmonic behavior of plasma enhanced atomic layer deposition grown Ag thin films