Markku A. Leskelä Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markku A. Leskelä returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1MANOS performance dependence on ALD Al2O3 oxidation source
2Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
3Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
4Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
5Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
6Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
7Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
8Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
9Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
10Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
11Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
12Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
13Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
14Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings