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Markku A. Leskelä Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markku A. Leskelä returned 14 record(s).

NumberTitle
1Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
2Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
3Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
4Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
5Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
6Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
7Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
8Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
9MANOS performance dependence on ALD Al2O3 oxidation source
10Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage
11Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
12Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
13Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
14Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars