Markku A. Leskelä Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Markku A. Leskelä returned 14 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1MANOS performance dependence on ALD Al2O3 oxidation source
2Radical Enhanced Atomic Layer Deposition of Tantalum Oxide - Thesis Coverage
3Low-Temperature Deposition of Aluminum Oxide by Radical Enhanced Atomic Layer Deposition - Thesis Coverage
4Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates
5Radical Enhanced Atomic Layer Deposition of Titanium Dioxide - Thesis Coverage
6Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
7Deposition of copper by plasma-enhanced atomic layer deposition using a novel N-Heterocyclic carbene precursor
8Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
9Radical Enhanced Atomic Layer Deposition of Titanium Dioxide
10Preparation of Lithium Containing Oxides by the Solid State Reaction of Atomic Layer Deposited Thin Films
11Optimization of the Silver Nanoparticles PEALD Process on the Surface of 1-D Titania Coatings
12Radical-Enhanced Atomic Layer Deposition of Metallic Copper Thin Films - Thesis Coverage
13Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
14Radical-Enhanced Atomic Layer Deposition of Silver Thin Films Using Phosphine-Adducted Silver Carboxylates - Thesis Coverage