Maarit I. Kariniemi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Maarit I. Kariniemi returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Conformality of remote plasma-enhanced atomic layer deposition processes: An experimental study
2Large-area plasmonic hot-spot arrays: sub-2 nm interparticle separations with plasma-enhanced atomic layer deposition of Ag on periodic arrays of Si nanopillars
3Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films