Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition

Type:
Journal
Info:
J. Phys. Chem. C, 2019, 123 (44), pp 27196-27206
Date:
2019-09-24

Author Information

Name Institution
Sabrina WackLuxembourg Institute of Science and Technology
Petru Lunca PopaLuxembourg Institute of Science and Technology
Noureddine AdjeroudLuxembourg Institute of Science and Technology
Jérôme GuillotLuxembourg Institute of Science and Technology
Bianca Rita PistilloLuxembourg Institute of Science and Technology
Renaud LeturcqLuxembourg Institute of Science and Technology

Films


Film/Plasma Properties

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Island Characterization
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Substrates

Si with native oxide

Keywords

Island Growth

Notes

1643