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Large-Scale Deposition and Growth Mechanism of Silver Nanoparticles by Plasma-Enhanced Atomic Layer Deposition
Type:
Journal
Info:
J. Phys. Chem. C, 2019, 123 (44), pp 27196-27206
Date:
2019-09-24
Author Information
| Name | Institution |
|---|---|
| Sabrina Wack | Luxembourg Institute of Science and Technology |
| Petru Lunca Popa | Luxembourg Institute of Science and Technology |
| Noureddine Adjeroud | Luxembourg Institute of Science and Technology |
| Jérôme Guillot | Luxembourg Institute of Science and Technology |
| Bianca Rita Pistillo | Luxembourg Institute of Science and Technology |
| Renaud Leturcq | Luxembourg Institute of Science and Technology |
Films
Plasma Ag
Film/Plasma Properties
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Island Characterization
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Thickness
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Characteristic: Chemical Composition, Impurities
Analysis: AES, Auger Electron Spectroscopy
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Substrates
| Si with native oxide |
Notes
| 1643 |