Search 1530 plasma ALD publications by:
Search 1530 plasma ALD publications by:
Publication Information
Title:
The Influence of Technology and Switching Parameters on Resistive Switching Behavior of Pt/HfO2/TiN MIM Structures
Type:
Journal
Info:
Facta universitatis - series: Electronics and Energetics 2014 Volume 27, Issue 4, Pages: 621-630
Date:
2014-07-21
Author Information
Name | Institution |
---|---|
Albena Paskaleva | Bulgarian Academy of Sciences |
Films
Plasma HfO2
Thermal HfO2
Film/Plasma Properties
Substrates
Keywords
Notes
197 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |