Publication Information

Title:
Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene
Type:
Conference Proceedings
Info:
Applied Physics of Condensed Matter (APCOM) 2015
Date:
2015-05-15

Author Information

Name Institution
Jana BrndiarováSlovak Academy of Sciences
Karol FröhlichSlovak Academy of Sciences
Martin HulmanSlovak Academy of Sciences
Alica RosováSlovak Academy of Sciences
Edmund DobročkaSlovak Academy of Sciences
Tauno KahroUniversity of Tartu
Jaan AarikUniversity of Tartu

Films

Thermal Al2O3


Thermal Al2O3


Plasma Al2O3


Film/Plasma Properties

Characteristic: Raman Spectra
Analysis: Raman Spectroscopy

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Unknown
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy

Substrates

Graphene

Keywords

Notes

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