Your search for plasma enhanced atomic layer deposition publications authored by Jaan Aarik returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Evaluation of Thermal Versus Plasma-Assisted ALD Al2O3 as Passivation for InAlN/AlN/GaN HEMTs|
|2||Integration of Atomic Layer Deposited Al2O3 Dielectrics with Graphene|
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