Impurity Gettering by Atomic-Layer-Deposited Aluminium Oxide Films on Silicon at Contact Firing Temperatures
Type:
Journal
Info:
physica status solidi (RRL) - Rapid Research Letters Volume 12, Issue 3, pages 1700430
Date:
2017-12-28
Author Information
Name | Institution |
---|---|
AnYao Liu | The Australian National University |
Daniel Macdonald | The Australian National University |
Films
Plasma Al2O3
Film/Plasma Properties
Substrates
Silicon |
Notes
1090 |