A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
APL Mater. 8, 071101 (2020)
Date:
2020-06-15
Author Information
| Name | Institution |
|---|---|
| Tuan Anh Nguyen | Luxembourg Institute of Science and Technology |
| Noureddine Adjeroud | Luxembourg Institute of Science and Technology |
| Sebastjan Glinsek | Luxembourg Institute of Science and Technology |
| Yves Fleming | Luxembourg Institute of Science and Technology |
| Jérôme Guillot | Luxembourg Institute of Science and Technology |
| Patrick Grysan | Luxembourg Institute of Science and Technology |
| Jérôme Polesel-Maris | Luxembourg Institute of Science and Technology |
Films
Plasma AlN
Film/Plasma Properties
Characteristic: Thickness
Analysis: Ellipsometry
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Characteristic: Piezoelectric properties
Analysis: Custom
Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: X-ray Pole Figure
Substrates
| Si(100) |
| Ni |
Notes
| 1497 |