Tuan Anh Nguyen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Tuan Anh Nguyen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition|
|2||In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment|