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A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition

Type:
Journal
Info:
APL Mater. 8, 071101 (2020)
Date:
2020-06-15
DOI:
http://dx.doi.org/10.1063/5.0011331

Author Information

Name Institution
Tuan Anh NguyenLuxembourg Institute of Science and Technology
Noureddine AdjeroudLuxembourg Institute of Science and Technology
Sebastjan GlinsekLuxembourg Institute of Science and Technology
Yves FlemingLuxembourg Institute of Science and Technology
Jérôme GuillotLuxembourg Institute of Science and Technology
Patrick GrysanLuxembourg Institute of Science and Technology
Jérôme Polesel-MarisLuxembourg Institute of Science and Technology

Films

Plasma AlN

Hardware used: Beneq TFS-200
TMA, Trimethylaluminum, Trimethylalumane, AlMe3, Al(CH3)3
CAS#: 75-24-1
N2, Nitrogen
CAS#: 7727-37-9
H2, Hydrogen
CAS#: 1333-74-0
Deposition Temperature Range = 180-250C

Film/Plasma Properties

Characteristic: Thickness
Analysis: Ellipsometry
Diagnostic: J.A. Woollam

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction
Diagnostic: Bruker D8 Discover

Characteristic: Microstructure
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Helios Nanolab600

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Helios Nanolab600

Characteristic: Thickness
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Helios Nanolab600

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Bruker Innova

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Chemical Binding
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: Kratos Analytical Axis Ultra DLD

Characteristic: Piezoelectric properties
Analysis: Custom
Diagnostic: Custom

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: X-ray Pole Figure
Diagnostic: -

Substrates

Si(100)
Ni

Notes

1497