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Tuan Anh Nguyen Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Tuan Anh Nguyen returned 2 record(s).

NumberTitle
1In0.53Ga0.47As FinFET and GAA-FET With Remote-Plasma Treatment
2A film-texture driven piezoelectricity of AlN thin films grown at low temperatures by plasma-enhanced atomic layer deposition