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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Photovoltaic Rudorffites: Lead-Free Silver Bismuth Halides Alternative to Hybrid Lead Halide Perovskites
Type:
Journal
Info:
ChemSusChem 2017, 10, 3754-3759
Date:
2017-06-28
Author Information
| Name | Institution |
|---|---|
| Ivan Turkevych | Chemical Materials Evaluation and Research Base (CEREBA) |
| Said Kazaoui | National Institute of Advanced Industrial Science and Technology |
| Eisuke Ito | Chemical Materials Evaluation and Research Base (CEREBA) |
| Toshiyuki Urano | Chemical Materials Evaluation and Research Base (CEREBA) |
| Koji Yamada | Nihon University |
| Hiroshi Tomiyasu | Chemical Materials Evaluation and Research Base (CEREBA) |
| Hideo Yamagishi | Chemical Materials Evaluation and Research Base (CEREBA) |
| Michio Kondo | National Institute of Advanced Industrial Science and Technology |
| Shinji Aramaki | Chemical Materials Evaluation and Research Base (CEREBA) |
Films
Film/Plasma Properties
Substrates
| FTO, F:SnO2 |
Keywords
| Solar |
Notes
| 1115 |