Publication Information

Title: Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition

Type: Journal

Info: Proc. SPIE 8820, Nanoepitaxy: Materials and Devices V, 88200Y (September 19, 2013);

Date: 2013-09-13

DOI: http://dx.doi.org/10.1117/12.2023826

Author Information

Name

Institution

University of California - Santa Cruz

University of California - Santa Cruz

University of California Observatories

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7782-44-7

Plasma TiO2 using Unknown

Deposition Temperature Range N/A

Plasma HfO2 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Diffusion Barrier Properties

Unknown

Unknown

Reflectivity

Optical Reflectivity

Unknown

Optical Properties

Optical Absorption

Unknown

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

Unknown

Substrates

YF3

Y2O3

HfO2

TiO2

Keywords

Diffusion Barrier

Optical

Notes

582



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