Publication Information

Title: Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition

Type: Journal

Info: Proc. SPIE 8820, Nanoepitaxy: Materials and Devices V, 88200Y (September 19, 2013);

Date: 2013-09-13

DOI: http://dx.doi.org/10.1117/12.2023826

Author Information

Name

Institution

University of California - Santa Cruz

University of California - Santa Cruz

University of California Observatories

Films

Plasma Al2O3 using Unknown

Deposition Temperature Range N/A

75-24-1

7782-44-7

Plasma TiO2 using Unknown

Deposition Temperature Range N/A

Plasma HfO2 using Unknown

Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Diffusion Barrier Properties

Unknown

-

Reflectivity

Optical Reflectivity

-

Optical Properties

Optical Absorption

-

Morphology, Roughness, Topography

AFM, Atomic Force Microscopy

-

Substrates

YF3

Y2O3

HfO2

TiO2

Keywords

Diffusion Barrier

Optical

Notes

582



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