Publication Information

Title:
Moisture barrier and chemical corrosion protection of silver-based telescope mirrors using aluminum oxide films by plasma-enhanced atomic layer deposition
Type:
Journal
Info:
Proc. SPIE 8820, Nanoepitaxy: Materials and Devices V, 88200Y (September 19, 2013);
Date:
2013-09-13

Author Information

Name Institution
David M. FryaufUniversity of California - Santa Cruz
Andrew C. PhillipsUniversity of California - Santa Cruz
Nobuhiko P. KobayashiUniversity of California Observatories

Films

Plasma Al2O3


Plasma TiO2

Hardware used: Unknown


Plasma HfO2

Hardware used: Unknown


Film/Plasma Properties

Characteristic: Diffusion Barrier Properties
Analysis: -

Characteristic: Reflectivity
Analysis: Optical Reflectivity

Characteristic: Optical Properties
Analysis: Optical Absorption

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Substrates

YF3
Y2O3
HfO2
TiO2

Keywords

Diffusion Barrier
Optical

Notes

582