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Publication Information

Title: New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers

Type: Conference Proceedings

Info: Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II

Date: 2016-06-26

DOI: http://dx.doi.org/10.1117/12.2232538

Author Information

Name

Institution

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Fraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma TiO2 using Unknown

Deposition Temperature Range = 100-120C

Plasma Al2O3 using Unknown

Deposition Temperature Range = 100-120C

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

SiO2

Keywords

Nanolaminate

Notes

832


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