New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers

Type:
Conference Proceedings
Info:
Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II
Date:
2016-06-26
DOI:
http://dx.doi.org/10.1117/12.2232538

Author Information

Name Institution
T. Flügel-PaulFraunhofer Institute for Applied Optics and Precision Engineering
G. KalkowskiFraunhofer Institute for Applied Optics and Precision Engineering
T. BenkensteinFraunhofer Institute for Applied Optics and Precision Engineering
T. HarzendorfFraunhofer Institute for Applied Optics and Precision Engineering
A. MatthesFraunhofer Institute for Applied Optics and Precision Engineering
U. D. ZeitnerFraunhofer Institute for Applied Optics and Precision Engineering

Films

Plasma TiO2

Hardware used: Unknown
Deposition Temperature Range = 100-120C

Plasma Al2O3

Hardware used: Unknown
Deposition Temperature Range = 100-120C

Film/Plasma Properties

Substrates

SiO2

Notes

832