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Publication Information

Title: High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films

Type: Journal

Info: Journal of Vacuum Science & Technology A 30, 021502 (2012)

Date: 2011-12-30

DOI: http://dx.doi.org/10.1116/1.3678486

Author Information

Name

Institution

Lotus Applied Technology

Lotus Applied Technology

Films

Plasma TiO2 using Custom

Deposition Temperature Range N/A

7550-45-0

7782-44-7

Plasma Al2O3 using Custom

Deposition Temperature Range N/A

75-24-1

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Water Vapor Transmission Rate (WVTR)

Unknown

Unknown

Substrates

PET, Polyethylene Terephthalate

Keywords

Roll-to-Roll

Notes

649


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