High rate roll to roll atomic layer deposition, and its application to moisture barriers on polymer films
Type:
Journal
Info:
Journal of Vacuum Science & Technology A 30, 021502 (2012)
Date:
2011-12-30
Author Information
| Name | Institution |
|---|---|
| Eric Dickey | Lotus Applied Technology |
| William A. Barrow | Lotus Applied Technology |
Films
Film/Plasma Properties
Characteristic: Water Vapor Transmission Rate (WVTR)
Analysis: -
Substrates
| PET, Polyethylene Terephthalate |
Notes
| 649 |