Photo-Patternable ZnO Thin Films Based on Cross-Linked Zinc Acrylate for Organic/Inorganic Hybrid Complementary Inverters

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2016, 8 (8), pp 5499-5508
Date:
2016-02-03
DOI:
http://dx.doi.org/10.1021/acsami.6b00259

Author Information

Name Institution
Yong Jin JeongPohang University of Science and Technology (POSTECH)
Tae Kyu AnKorea National University of Transportation
Dong-Jin YunSamsung Advanced Institute of Technology
Lae Ho KimPohang University of Science and Technology (POSTECH)
Seonuk ParkPohang University of Science and Technology (POSTECH)
Yebyeol KimPohang University of Science and Technology (POSTECH)
Sooji NamElectronics and Telecommunication Research Institute, (ETRI)
Keun Hyung LeeInha University
Se Hyun KimYeungnam University
Jaeyoung JangHanyang University
Chan Eon ParkPohang University of Science and Technology (POSTECH)

Films

Plasma Al2O3

Hardware used: Unknown
Deposition Temperature Range N/A

Plasma TiO2

Hardware used: Unknown
Deposition Temperature Range N/A

Film/Plasma Properties

Characteristic: Transistor Characteristics
Analysis: Transistor Characterization
Diagnostic: Keithley 4200-SCS

Substrates

Silicon

Notes

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