Publication Information

Title:
Atomic layer deposition of epitaxial layers of anatase on strontium titanate single crystals: Morphological and photoelectrochemical characterization
Type:
Journal
Info:
J. Vac. Sci. Technol. A 33(1), Jan/Feb 2015
Date:
2014-11-11

Author Information

Name Institution
Theodore J. KrausUniversity of Wyoming
Alexander B. NepomnyashchiiUniversity of Wyoming
B. A. ParkinsonUniversity of Wyoming

Films

Thermal TiO2


Film/Plasma Properties

Characteristic: Crystallinity, Crystal Structure, Grain Size, Atomic Structure
Analysis: XRD, X-Ray Diffraction

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy

Characteristic: Thickness
Analysis: Ellipsometry

Characteristic: Thickness
Analysis: XRR, X-Ray Reflectivity

Characteristic: Photocurrent
Analysis: Photocurrent Measurements

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy

Substrates

SrTiO3
Silicon

Keywords

High-k Dielectric Thin Films
Titanium Compounds

Notes

Ultratech Fiji epitaxial thermal ALD study of anatase TiO2 on SrTiO3.
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