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The publication database currently has 1567 entries.

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195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

84 Theses

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In vacuo investigations on the nucleation of TaCN by plasma enhanced atomic layer deposition In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films Influence of oxygen source on the ferroelectric properties of ALD grown Hf_1-xZr_xO₂ films

Search 1567 plasma ALD publications by:

195 Films Compositions

265 Precursors and Plasma Gases

76 Deposition Hardwares

242 Film and Plasma Characteristics

Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination

Type:

Journal

Info:

Nano Energy Volume 30, December 2016, Pages 460-469

Date:

2016-10-15

DOI:

http://dx.doi.org/10.1016/j.nanoen.2016.10.030

Author Information

Name	Institution
Francesco Di Giacomo	University of Rome - Tor Vergata
Valerio Zardetto	Eindhoven University of Technology
G. Lucarelli	University of Rome - Tor Vergata
L. Cinà	University of Rome - Tor Vergata
Aldo Di Carlo	University of Rome - Tor Vergata
Mariadriana Creatore	Eindhoven University of Technology
Thomas M. Brown	University of Rome - Tor Vergata

Films

Plasma TiO₂

Hardware used: Unknown

Deposition Temperature = 150C

Film/Plasma Properties

Substrates

ITO

Keywords

Solar

Notes

949