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Initial and steady-state Ru growth by atomic layer deposition studied by in situ Angle Resolved X-ray Photoelectron Spectroscopy
Innovative remote plasma source for atomic layer deposition for GaN devices
Influence of plasma species on the early-stage growth kinetics of epitaxial InN grown by plasma-enhanced atomic layer deposition
Optical in situ monitoring of plasma-enhanced atomic layer deposition process
The role of active species in the N2 and N2-H2 RF afterglows on selective surface nitriding of ALD-grown TiO2 films
Mesoporous perovskite solar cells and the role of nanoscale compact layers for remarkable all-round high efficiency under both indoor and outdoor illumination
Type:
Journal
Info:
Nano Energy Volume 30, December 2016, Pages 460-469
Date:
2016-10-15
Author Information
| Name | Institution |
|---|---|
| Francesco Di Giacomo | University of Rome - Tor Vergata |
| Valerio Zardetto | Eindhoven University of Technology |
| G. Lucarelli | University of Rome - Tor Vergata |
| L. Cinà | University of Rome - Tor Vergata |
| Aldo Di Carlo | University of Rome - Tor Vergata |
| Mariadriana Creatore | Eindhoven University of Technology |
| Thomas M. Brown | University of Rome - Tor Vergata |
Films
Film/Plasma Properties
Substrates
| ITO |
Keywords
| Solar |
Notes
| 949 |