Adriana Szeghalmi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriana Szeghalmi returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Composite materials and nanoporous thin layers made by atomic layer deposition
2Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
3Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
4Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
5Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
6Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
7High-efficiency embedded transmission grating
8Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
9Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
10Comparative study of ALD SiO2 thin films for optical applications
11Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
12Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
13High-Reflective Coatings For Ground and Space Based Applications