Adriana Szeghalmi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriana Szeghalmi returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
2Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
3Comparative study of ALD SiO2 thin films for optical applications
4Composite materials and nanoporous thin layers made by atomic layer deposition
5Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
6High-efficiency embedded transmission grating
7High-Reflective Coatings For Ground and Space Based Applications
8Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
9Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
10Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
11Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
12Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
13Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies