Adriana Szeghalmi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Adriana Szeghalmi returned 13 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coating on PMMA Substrates by Atomic Layer Deposition
2High-efficiency embedded transmission grating
3Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
4Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
5Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
6Tuning Material Properties of Oxides and Nitrides by Substrate Biasing during Plasma-Enhanced Atomic Layer Deposition on Planar and 3D Substrate Topographies
7Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
8Comparative study of ALD SiO2 thin films for optical applications
9Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
10Composite materials and nanoporous thin layers made by atomic layer deposition
11Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material
12Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
13High-Reflective Coatings For Ground and Space Based Applications