Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms

Type:
Journal
Info:
ACS Appl. Mater. Interfaces, 2017, 9 (19), pp 16138-16147
Date:
2017-04-25
DOI:
http://dx.doi.org/10.1021/acsami.7b01274

Author Information

Name Institution
Qian ChengArizona State University
Manpuneet K. BenipalArizona State University
Qianlang LiuArizona State University
Xingye WangArizona State University
Peter A. CrozierArizona State University
Candace K. ChanArizona State University
Robert J. NemanichArizona State University

Films

Plasma ZnO

Hardware used: Custom
DMZ, DiMethylZinc, ZnMe2, Zn(CH3)2
CAS#: 544-97-8
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 130C

Plasma Al2O3

Hardware used: Custom
DMAI, dimethylaluminum isopropoxide, Me2Al(O-i-Pr)3
CAS#: 6063-89-4
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 160C

Plasma SiO2

Hardware used: Custom
3DMASi, (Me2N)3SiH, [(CH3)2N]3SiH, Tris(DiMethylAmido) Silane
CAS#: 15112-89-7
Where to buy precursor
O2, Oxygen
CAS#: 7782-44-7
Deposition Temperature = 25C

Film/Plasma Properties

Characteristic: Chemical Composition, Impurities
Analysis: XPS, X-ray Photoelectron Spectroscopy
Diagnostic: VG-Scienta R3000

Characteristic: Valence Band
Analysis: UPS, Ultraviolet Photoemission Spectroscopy
Diagnostic: -

Characteristic: Work Function
Analysis: UPS, Ultraviolet Photoemission Spectroscopy
Diagnostic: -

Characteristic: Valence Band Offset
Analysis: UPS, Ultraviolet Photoemission Spectroscopy
Diagnostic: -

Characteristic: Morphology, Roughness, Topography
Analysis: AFM, Atomic Force Microscopy
Diagnostic: Asylum Research MFP-3D

Characteristic: Morphology, Roughness, Topography
Analysis: SEM, Scanning Electron Microscopy
Diagnostic: FEI Nova

Characteristic: Images
Analysis: TEM, Transmission Electron Microscope
Diagnostic: JEOL 2010F

Characteristic: Chemical Composition, Impurities
Analysis: EDS, EDX, Energy Dispersive X-ray Spectroscopy
Diagnostic: JEOL 2010F

Characteristic: Photoelectrochemical (PEC) Activity
Analysis: Photoelectrochemical (PEC) Activity
Diagnostic: Bio-Logic SP-200

Characteristic: Photocurrent
Analysis: Linear Sweep Voltammetry
Diagnostic: Newport Solar Simulator

Characteristic: Unknown
Analysis: CA, Chronoamperometry
Diagnostic: -

Substrates

ZnO
Silicon
FTO, F:SnO2

Notes

1160