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The publication database currently has 1553 entries.
Search from:
190 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics
83 Theses

Use Multifactor Search for more complex searches and for searching by other criteria (author, affiliation, analysis, deposition temperature)


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Recent Database Additions
Remote Plasma Atomic Layer Deposition of SiNx Using Cyclosilazane and H2/N2 Plasma Remote plasma-enhanced atomic layer deposition of gallium oxide thin films with NH3 plasma pretreatment Remote plasma-enhanced atomic layer deposition of metallic TiN films with low work function and high uniformity
Search 1553 plasma ALD publications by:
190 Films Compositions
401 Precursors and Plasma Gases
75 Deposition Hardwares
241 Film and Plasma Characteristics

DMZ, DiMethylZinc, ZnMe2, Zn(CH3)2, CAS# 544-97-8

Where to buy

NumberVendorLink
1EreztechDimethylzinc

Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for publications using this chemistry returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
2Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
3Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
4Plasma-Enhanced Atomic Layer Deposition of Semiconductor Grade ZnO Using Dimethyl Zinc
5Radical Enhanced Atomic Layer Deposition of Metals and Oxides
6Self-limiting deposition of semiconducting ZnO by pulsed plasma-enhanced chemical vapor deposition

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Popular Films
NbN
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Recently Added Films
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Popular Precursors
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Top Authors
Erwin (W.M.M.) Kessels
Hyeongtag Jeon
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