Robert J. Nemanich Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert J. Nemanich returned 9 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Plasma enhanced atomic layer deposition and atomic layer etching of gallium oxide using trimethylgallium
2Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
3Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
4Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
5Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects
6Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
7Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
8Comparison of AlF3 thin films grown by thermal and plasma enhanced atomic layer deposition
9Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms