Robert J. Nemanich Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Robert J. Nemanich returned 7 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Al2O3 and SiO2 Atomic Layer Deposition Layers on ZnO Photoanodes and Degradation Mechanisms
2Al2O3 Insertion Layer for Improved PEALD SiO2/(Al)GaN Interfaces
3Band alignment of zinc oxide as a channel layer in a gate stack structure grown by plasma enhanced atomic layer deposition
4Characterization of plasma-enhanced atomic layer deposition of Al2O3 using dimethylaluminum isopropoxide
5Low temperature growth of high-k Hf-La oxides by remote-plasma atomic layer deposition: Morphology, stoichiometry, and dielectric properties
6Photochemical Reaction Patterns on Heterostructures of ZnO on Periodically Poled Lithium Niobate
7Toward plasma enhanced atomic layer deposition of oxides on graphene: Understanding plasma effects