Search 1531 plasma ALD publications by:
Search 1531 plasma ALD publications by:
Publication Information
Title:
Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current
Type:
Journal
Info:
Microelectronics Reliability Volume 63, 2016, Pages 52 - 55
Date:
2016-05-24
Author Information
Name | Institution |
---|---|
J. Chen | Tokyo Institute of Technology |
H. Wakabayashi | Tokyo Institute of Technology |
K. Tsutsui | Tokyo Institute of Technology |
H. Iwai | Tokyo Institute of Technology |
K. Kakushima | Tokyo Institute of Technology |
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Erwin (W.M.M.) Kessels |
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