H. Wakabayashi Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by H. Wakabayashi returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Atomic layer deposition of Y2O3 thin films with a high growth per cycle by Ar multiple boost injection
2Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current