J. Chen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by J. Chen returned 1 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
| Number | Title |
|---|---|
| 1 | Poly-Si gate electrodes for AlGaN/GaN HEMT with high reliability and low gate leakage current |