Publication Information

Title:
Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides
Type:
Journal
Info:
Anal. Chem. 2012, 84, 10793-10801
Date:
2012-11-26

Author Information

Name Institution
Sam EmaminejadStanford University
Mehdi JavanmardStanford University
Robert W. DuttonStanford University
Ronald W. DavisStanford University

Films

Plasma Al2O3




Film/Plasma Properties

Substrates

Au
Cr
Glass

Keywords

Notes

PDMS bonding step only worked for SiO2, not for Al2O3 or HfO2.
Ultratech Fiji PEALD Al2O3, HfO2, and SiO2 for improved dielectrophoretic force generation.
PEALD SiO2 enabled nanoNewton dielectrophoretic force generation for rapid protein biomarker detection.
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