Publication Information

Title: Smart Surface for Elution of Protein-Protein Bound Particles: Nanonewton Dielectrophoretic Forces Using Atomic Layer Deposited Oxides

Type: Journal

Info: Anal. Chem. 2012, 84, 10793-10801

Date: 2012-11-26

DOI: http://dx.doi.org/10.1021/ac302857z

Author Information

Name

Institution

Stanford University

Stanford University

Stanford University

Stanford University

Films

Deposition Temperature = 200C

75-24-1

7782-44-7

Deposition Temperature = 200C

19962-11-9

7782-44-7

Deposition Temperature = 200C

15112-89-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Au

Cr

Glass

Keywords

Notes

PDMS bonding step only worked for SiO2, not for Al2O3 or HfO2.

Ultratech Fiji PEALD Al2O3, HfO2, and SiO2 for improved dielectrophoretic force generation.

PEALD SiO2 enabled nanoNewton dielectrophoretic force generation for rapid protein biomarker detection.

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