Search 1536 plasma ALD publications by:
Search 1536 plasma ALD publications by:
Publication Information
Title:
Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
Type:
Conference Proceedings
Info:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Date:
2013-06-16
Author Information
Name | Institution |
---|---|
Sam Emaminejad | Stanford University |
Mehdi Javanmard | Stanford University |
C. Gupta | Stanford University |
Robert W. Dutton | Stanford University |
Ronald W. Davis | Stanford University |
R. T. Howe | Stanford University |
Films
Plasma SiO2
Film/Plasma Properties
Substrates
Au |
Cr |
Glass |
Keywords
Notes
591 |
Popular Precursors
Top Authors
Erwin (W.M.M.) Kessels |
Hyeongtag Jeon |
Hyungjun Kim |
Mauritius C. M. (Richard) van de Sanden |
Christophe Detavernier |