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Growth of Gallium Nitride Films on Multilayer Graphene Template Using Plasma-Enhanced Atomic Layer Deposition
Ni80Fe20 nanotubes with optimized spintronic functionalities prepared by atomic layer deposition
On the Contact Optimization of ALD-Based MoS2 FETs: Correlation of Processing Conditions and Interface Chemistry with Device Electrical Performance
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Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
Type:
Conference Proceedings
Info:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Date:
2013-06-16
Author Information
| Name | Institution |
|---|---|
| Sam Emaminejad | Stanford University |
| Mehdi Javanmard | Stanford University |
| C. Gupta | Stanford University |
| Robert W. Dutton | Stanford University |
| Ronald W. Davis | Stanford University |
| R. T. Howe | Stanford University |
Films
Plasma SiO2
Film/Plasma Properties
Substrates
| Au |
| Cr |
| Glass |
Keywords
Notes
| 591 |