2021 Year in Review
The publication database currently has 1628 entries.
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203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses
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Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy
Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers
Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
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Applications of nanoNewton dielectrophoretic forces using atomic layer deposited oxides for microfluidic sample preparation and proteomics
Type:
Conference Proceedings
Info:
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Date:
2013-06-16
Author Information
| Name | Institution |
|---|---|
| Sam Emaminejad | Stanford University |
| Mehdi Javanmard | Stanford University |
| C. Gupta | Stanford University |
| Robert W. Dutton | Stanford University |
| Ronald W. Davis | Stanford University |
| R. T. Howe | Stanford University |
Films
Plasma SiO2
Film/Plasma Properties
Substrates
| Au |
| Cr |
| Glass |
Keywords
Notes
| 591 |