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Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
Type:
Journal
Info:
Journal of Applied Physics 120, 015103 (2016)
Date:
2016-06-21
Author Information
| Name | Institution |
|---|---|
| Scott W. Fong | Stanford University |
| Aditya Sood | Stanford University |
| Liang Chen | Xi'an Jiaotong University |
| Niru Kumari | Hewlett-Packard |
| Mehdi Asheghi | Stanford University |
| Kenneth E. Goodson | Stanford University |
| Gary A. Gibson | Hewlett-Packard |
| H.-S. P. Wong | Stanford University |
Films
Film/Plasma Properties
Characteristic: Thermal Conductivity
Analysis: Custom
Characteristic: Density
Analysis: XRR, X-Ray Reflectivity
Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy
Substrates
| Al2O3 |
| SiO2 |
Notes
| 910 |