Publication Information

Title:
Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
Type:
Journal
Info:
Journal of Applied Physics 120, 015103 (2016)
Date:
2016-06-21

Author Information

Name Institution
Scott W. FongStanford University
Aditya SoodStanford University
Liang ChenXi'an Jiaotong University
Niru KumariHewlett-Packard
Mehdi AsheghiStanford University
K. E. GoodsonStanford University
Gary A. GibsonHewlett-Packard
H.-S. P. WongStanford University

Films

Plasma SiNx


Plasma SiO2


Plasma Al2O3


Film/Plasma Properties

Characteristic: Thermal Conductivity
Analysis: Custom

Characteristic: Density
Analysis: XRR, X-Ray Reflectivity

Characteristic: Images
Analysis: SEM, Scanning Electron Microscopy

Substrates

Al2O3
SiO2

Keywords

Nanolaminate

Notes

910