Kenneth E. Goodson Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Kenneth E. Goodson returned 3 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

1Thermal Interface Enhancement via Inclusion of an Adhesive Layer Using Plasma-Enhanced Atomic Layer Deposition
2Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction
3Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide