Your search for plasma enhanced atomic layer deposition publications authored by K. E. Goodson returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Dielectric barrier layers by low-temperature plasma-enhanced atomic layer deposition of silicon dioxide|
|2||Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction|
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