Liang Chen Plasma Enhanced Atomic Layer Deposition Film Publications
Your search for plasma enhanced atomic layer deposition publications authored by Liang Chen returned 2 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.
|1||Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction|
|2||Thermal conductivity measurement of amorphous dielectric multilayers for phase-change memory power reduction|