Publication Information

Title:
Steady-state Thermal Conductivity Measurement of Dielectric Stacks for Phase-Change Memory Power Reduction
Type:
Other
Info:
HP Laboratories Technical Report
Date:
2015-07-21

Author Information

Name Institution
Scott W. FongHewlett-Packard
Gary A. GibsonHewlett-Packard
Liang ChenHewlett-Packard
Aditya SoodHewlett-Packard
Mehdi AsheghiHewlett-Packard
Niru KumariHewlett-Packard
H.-S. P. WongHewlett-Packard

Films

Plasma SiO2


Plasma SiNx


Plasma Al2O3


Film/Plasma Properties

Substrates

Silicon

Keywords

Notes

384