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Publication Information

Title: Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors

Type: Journal

Info: Phys. Rev. Lett. 15, 448-456, 2016

Date: 2016-03-14

DOI: http://dx.doi.org/10.1109/TNANO.2016.2541859

Author Information

Name

Institution

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

University of Texas at Austin

Films

Deposition Temperature Range N/A

15112-89-7

7782-44-7

Film/Plasma Properties

Characteristic

Analysis

Diagnostic

Substrates

Keywords

Notes

815


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