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Nanoshape Imprint Lithography for Fabrication of Nanowire Ultracapacitors
Type:
Journal
Info:
Phys. Rev. Lett. 15, 448-456, 2016
Date:
2016-03-14
Author Information
| Name | Institution |
|---|---|
| Anshuman Cherala | University of Texas at Austin |
| Meghali Chopra | University of Texas at Austin |
| Bailey Yin | University of Texas at Austin |
| Akhila Mallavarapu | University of Texas at Austin |
| Shrawan Singhal | University of Texas at Austin |
| Ovadia Abed | University of Texas at Austin |
| Roger Bonnecaze | University of Texas at Austin |
| S. V. Sreenivasan | University of Texas at Austin |
Films
Plasma SiO2
Film/Plasma Properties
Substrates
Notes
| 815 |