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2021 Year in Review




The publication database currently has 1628 entries.
Search from:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics
90 Theses

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Recent Database Additions
Effect of atomic layer plasma treatment on TALD-ZrO2 film to improve the corrosion protection of Mg-Ca alloy Deposition and Characterization of RP-ALD SiO2 Thin Films with Different Oxygen Plasma Powers Electrochemical Activation of Atomic Layer-Deposited Cobalt Phosphate Electrocatalysts for Water Oxidation
Search 1628 plasma ALD publications by:
203 Films Compositions
272 Precursors and Plasma Gases
77 Deposition Hardwares
251 Film and Plasma Characteristics

Andreas Tünnermann Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications authored by Andreas Tünnermann returned 10 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Antireflection Coatings for Strongly Curved Glass Lenses by Atomic Layer Deposition
2Comparative study of ALD SiO2 thin films for optical applications
3Composite materials and nanoporous thin layers made by atomic layer deposition
4Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing
5High-efficiency embedded transmission grating
6Inhibition of Crystal Growth during Plasma Enhanced Atomic Layer Deposition by Applying BIAS
7Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range
8Mechanical, structural, and optical properties of PEALD metallic oxides for optical applications
9Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
10Plasma-enhanced atomic layer deposition for antireflection coatings using SiO2 as low-refractive index material

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