AlSixOy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlSixOy films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
2Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
3Composite materials and nanoporous thin layers made by atomic layer deposition
4Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
5Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
6Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells