AlSixOy Plasma Enhanced Atomic Layer Deposition Film Publications

Your search for plasma enhanced atomic layer deposition publications discussing AlSixOy films returned 6 record(s). If there are too many results, you may want to use the multi-factor search to narrow the results.

NumberTitle
1Band offset of Al1-xSixOy mixed oxide on GaN evaluated by hard X-ray photoelectron spectroscopy
2Nanoporous SiO2 thin films made by atomic layer deposition and atomic etching
3Characteristics of Aluminum Silicate Films Grown by Plasma-Enhanced Atomic Layer Deposition
4Composite materials and nanoporous thin layers made by atomic layer deposition
5Electrical Properties of Aluminum Silicate Films Grown by Plasma Enhanced Atomic Layer Deposition
6Room-temperature plasma enhanced atomic layer deposition of aluminum silicate and its application in dye-sensitized solar cells